FLUENS – The Revolution in Reactive Sputtering

Welcome to Fluens Corporation

Fluens Corporation, located just west of Boston Massachusetts, is a dynamic technology company with a patented innovative approach to reactive sputtering.  The Fluens PVD reactor employs a novel approach to reactive sputter deposition compared to systems currently available. 

Technology

The Fluens reactor uses patented technology to circumvent issues which plague conventional reactive sputtering systems.  The result is a reliable high throughput system with no risk of target poisoning.

 

Contact

Fluens Corporation

70 Old Canal Drive

Lowell, MA 01851 USA

Telephone:  978-934-9999

          Fax:  978-934-9906

 

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A Dual-Module Fluens PVD Reactor System